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EXCIMER
Lasers
Lambda Physiks continues to design and produce more
powerful, reliable and cost effective excimer lasers.
Outstanding specifications, like pulse energies up to
1200 mJ,
stabilized average power up to 300 W and
repetition rates
up to 4 kHz, combined with
unsurpassed reliability,
make Lambda Physik the first
choice for the best UV excimer
lasers in the world.
OPTexPro™ Series:
The air-cooled OPTexPro is available in 157 nm, 193 nm, 248 nm, 308 nm,
and 351 nm,
and features a maintenance-free solid state switch, smooth
preionization,
and optimized
gas flow for efficient operation up to 500 Hz.
COMPex Pro Series: All COMPex lasers are equipped with Lambda Physiks
patented
NovaTube technology, providing stable laser performance,
reduced maintenance
and
the lowest operating costs.
LPX® Series: LPX® models are medium to high duty cycle excimer
lasers, offering
medium to high repetition rates for scientific and
industrial applications.
They combine
proven design with state-of-the-art
technology, setting new standards
for reliability and
performance.
NOVATEX™ Series: NOVATEX lasers are equipped with redesigned NovaTube
technology for outstanding energy stability and gas lifetime. The series
also offers
a high pointing stability and optics lifetime due to separated resonator
optics and
a cleanroom compatible stainless steel cabinet.
NovaLine® Series: The NovaLine® 100 is the most reliable and economical
KrF
industrial excimer laser available today, offering a new level of high
productivity in
micromachining F2 Series: Lambda
Physik F2 series offers laser systems with pulse
energies ranging from 1 to 50 mJ, repetition rates ranging from 1 to 4000
Hz and
average power ranging from 0.5 to 20 W.
FBG
Series: The Lambda Physik® excimer laser family for writing
fiber Bragg gratings
(FBG) offers everything from reliability, low-investment cost,
and low-cost
operation to
automated operation.
Lambda
STEEL® Series: The Lambda STEEL (STable Energy Excimer Laser)
lasers are the world's most powerful industrial excimer lasers, featuring
up to 1030 mJ
pulse energy at 308 nm. The high power and excellent pulse stability of
these lasers
simplifies the processing of large areas. |
