UV Optical Systems

MicroLas® develops, designs, and manufactures UV and
VUV optical systems, modules, and components and
provides services for feasibility studies, application lab
sample reparation/testing, and job shop opportunities to clients worldwide.
Sample preparation and job shop services are available for a wide variety of material
processing using 351 nm, 308 nm, 248 nm, 193 nm, and 157 nm wavelengths.

• CrystaLas: The CrystaLas optical annealing system employs the mask imaging
  technique to generate polycrystalline thin films. This optical annealing system
  is designed for integration into a research and development tool using a
  Lambda Physik® LPX® 210 excimer laser for R&D process development,
  or integration into a complete fabrication system using a Lambda STEEL
  excimer laser for industrial production lines.
  
• Line Beam: for excimer laser annealing (ELA) of typically 50 nm to 120 nm
  thick amorphous silicon films on large flat panel display glass substrates.
  
• VarioLas: VarioLas is ideal for high precision micromachining applications.
  Materials such as polyimide allow processing via cold ablation in the excimer
  laser wavelength ranges.
  
• GeoLas: automated high-end DUV systems for Solid Sampling via Laser
  Ablation Inductively Coupled Plasma Mass Spectrometry (LA-ICP-MS) for trace
  elemental analysis and other high-energy, hard material research.
  
• Optical Modules and Components: for the application of excimer lasers in
  process development and research, e.g. homogenizers and lenses.
  
• Attenuator Module: a compact tool designed for excimer lasers to accurately
  set and control the energy transmitted by the laser.
  
• 5x Optical Systems: manufactured for integration into workstations, and
  include an attenuator module, deflection mirrors, telescope lenses,
  homogenizer optics, field lenses, and a projection lens.